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Scanning electron microscopy (SEM) facilities

Capabilities in surface topography and composition analysis
  • https://www.sydney.edu.au/research/facilities/sydney-microscopy-and-microanalysis/access-our-facilities.html Access our facilities

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Learn more about our scanning electron microscopes which can be utilised for a range of research and industrial applications.

At Madsen (F09) - Camperdown campus

- Schottky field-emission electron source combined with field-free optics for UHR SEM applications
- Imaging surfaces with sub-nm resolution
- Stage biasing for low voltage imaging
- Highly diverse BSE imaging capability using various in-chamber and in-column detectors enabling energy and angular filtering to capture very fine detail
- Equipped with Mistral™  Plasma FIB optimised for both large area studies and for precise TEM or APT sample preparation
- 1mm plasma FIB column field of view enables large area sample prep as well as EDS and EBSD analysis in 3D
- Multi gas injection systems with range precursor gas options
- Integrated Oxford Instrument EDS and EBSD system with optimised TKD geometry
- Advanced techniques for seamless inverted or planar TEM sample geometry enabled by TECAN OptiLift manipulator
- Load lock for fast loading and unloading of samples
- Double tile stage for smooth surface milling of heterogenous materials
- Automated 3D imaging, EDS and EBSD mapping capabilities

- Schottky field-emission electron source combined with field free optics for UHR SEM applications
- Ideal for characterisation of materials at low beam energies for maximum surface topography
- Stage biasing for low voltage imaging
- Highly diverse BSE imaging capability allowing angle and energy selective BSE detection
- Excellent imaging of beam-sensitive and non-conductive samples
- Fully automated setup of electron beam - optimal imaging conditions guaranteed by In-Flight Beam Tracing™
- Intuitive live SEM sample navigation at magnification as low as 2x
- Optical overview camera for easy sample navigation
- High-speed EDS and EBSD acquisition
- High beam currents up to 400nA

At J03 - Darlington campus

- Schottky field-emission electron source combined with field-free optics for UHR SEM applications
- Imaging surfaces with sub-nm resolution
- Stage biasing for low voltage imaging
- Highly diverse BSE imaging capability using various in-chamber and in-column detectors enabling energy and angular filtering to capture very fine detail
- Equipped with Mistral™  Plasma FIB optimised for both large area studies and for precise TEM or APT sample preparation
- 1mm plasma FIB column field of view enables large area sample prep as well as EDS and EBSD analysis in 3D
- Multi gas injection systems with range precursor gas options
- Integrated Oxford Instrument EDS and EBSD system with optimised TKD geometry
- Advanced techniques for seamless inverted or planar TEM sample geometry enabled by TECAN OptiLift manipulator
- Load lock for fast loading and unloading of samples
- Double tile stage for smooth surface milling of heterogenous materials
- Automated 3D imaging, EDS and EBSD mapping capabilities

- Schottky field-emission electron source combined with field free optics for UHR SEM applications
- Ideal for characterisation of materials at low beam energies for maximum surface topography
- Stage biasing for low voltage imaging
- Highly diverse BSE imaging capability allowing angle and energy selective BSE detection
- Excellent imaging of beam-sensitive and non-conductive samples
- Fully automated setup of electron beam - optimal imaging conditions guaranteed by In-Flight Beam Tracing™
- Intuitive live SEM sample navigation at magnification as low as 2x
- Optical overview camera for easy sample navigation
- High-speed EDS and EBSD acquisition
- High beam currents up to 400nA

Contact us

Locations

Sydney Microscopy & Microanalysis operates sites across the University of Sydney Camperdown campus. Locations include:

  • Madsen Building (F09) - Administration (Room 234)
  • Charles Perkins Centre (D17)
  • Sydney Nanoscience Hub (A31)
  • Engineering and Technology Precinct (J03)
  • Brain & Mind Centre
  • Kolling Institute (G04)

Official node