The Research and Prototype Foundry is a Core Research Facility, based at the Sydney Nanoscience Hub, and is a member of the Australian National Fabrication Facility network. It offers instruments for the fabrication of devices and structures with features on the micro and nano scale. Our specialised processes allow researchers and industry to develop and prototype new devices.
The Research and Prototype Foundry, enables fabrication of a wide range of research material and devices, with applications in areas including optical chips, electronics, microfluidics and new quantum science and technology.
We provide access to state-of-the-art instruments and processes for lithography, etching, deposition, and metrology, backed up by a team of expert process engineers. Our capabilities and services support early development, enabling researchers and industry alike to make devices and prototype new ideas.
Send us your project goals and requirements, and our staff will put together a tailored registration and training program to ensure that you can make the most of our facilities.
University of Sydney staff and students receive special subsidised rates. Please login to the Intranet to view service and access rates.
Rate categories:
Access rates
| Rate category | External academic | PFRO | Commercial |
|---|---|---|---|
| Group 1 equipment | $9/hr | $50/hr | $65/hr |
| Group 2 equipment | $27/hr | $150/hr | $200/hr |
| Group 3 equipment | $36/hr | $200/hr | $265/hr |
| Training | $120/hr | $165/hr | $220/hr |
| Staff assistance | $120/hr | $165/hr | $220/hr |
Group 1 equipment
Group 2 equipment
Group 3 equipment
Photomasks
Prices exclude delivery and handling. Standard lead time is 10 business days.
| Size | External academic | PFRO / Commercial |
|---|---|---|
| 4” × 0.06” Soda lime | $315 | $476 |
| 5” × 0.09” Soda lime | $381 | $575 |
| 6” × 0.09” Soda lime | $480 | $716 |
| 7” × 0.12” Soda lime | $772 | $1,009 |
| 5” × 0.09” Quartz | $581 | $775 |
Notes:
Precious metals and some consumables are charged at cost. Masks use low reflective chrome by default. Other mask sizes and chrome types may be available upon request; contact us for pricing. Critical dimensions down to 2um are available under standard resolution. High-resolution is available upon request and can produce CD down to 1um. All mask designs must meet Foundry Guidelines to qualify for standard pricing; additional design charges based on staff labour rates may be incurred if this is not the case.
Approximately 700sqm of ISO 5 cleanroom space which houses Sydney’s deposition, etching, lithography, metrology, and wet processing facilities.
At the Research and Prototype Foundry, micro and nano-scale devices are made in our cleanroom. A cleanroom is a laboratory where the environment is strictly controlled to eliminate contaminants such as humidity and dust, which can affect sensitive products and processes.
Level 2 Sydney Nanoscience Hub (A31)
Approximately 75sqm of semi-clean space for PDMS processing and packaging
Lab 3021, Sydney Nanoscience Hub (A31)
FBG writing, testing, and annealing, plus fibre laser testing.
Physics Building (A28)
Fibre draw tower and CNC mill.
Physics Building (A28)
Locations
Our main facility is located in the Research wing of the Sydney Nanoscience Hub (A31), Physics Road, The University of Sydney NSW 2006.
We also operate a site in the adjacent Physics Building (A28).
