Outline

Overview

This unit of study provides a comprehensive introduction to semiconductor fabrication, covering the principles, processes, and technologies used to manufacture semiconductor devices. With lectures, tutorials and practical lab sessions, students will gain a deep understanding of the key concepts behind semiconductor fabrication and will learn how these principles are applied in modern semiconductor manufacturing facilities.

Unit details and rules

Academic unit	School of Electrical and Computer Engineering
Credit points	6
Prerequisites ?	None
Corequisites ?	None
Prohibitions ?	None
Assumed knowledge ?	Basic knowledge of physics and semiconductor devices (e.g., PN junctions, electrons and holes) is assumed
Available to study abroad and exchange students	Yes

Teaching staff

Coordinator	Steve Shu, steve.shu@sydney.edu.au

Assessment

The census date for this unit availability is 31 March 2026

Details
Criteria

Type	Description	Weight	Due	Length	Use of AI
Written exam	Final Exam Final exam	60%	Formal exam period	2 hours	AI prohibited
Outcomes assessed:
Practical skill	Lab completion Each lab is worth 1%, totaling 6% for 6 labs.	6%	Multiple weeks	Assessement during labs	AI allowed
Outcomes assessed:
In-class quiz	Quiz in Tutorials Each quiz is worth 2%, totaling 12% for 6 quizzes in 6 tutorials	12%	Multiple weeks	30 minutes	AI allowed
Outcomes assessed:
Portfolio or journal	Lab reports Each lab is worth 1%, totaling 6% for 6 labs.	6%	Multiple weeks	n/a	AI allowed
Outcomes assessed:
Research analysis	Project Report Technical report and presentation on a chosen topic	8%	Week 12 Due date: 24 May 2026 at 23:59	10-page report and 10-minute talk	AI allowed
Outcomes assessed:
Presentation	Project Presentation Technical report and presentation on a chosen topic	8%	Week 12	n/a	AI allowed
Outcomes assessed:

Assessment summary

Practical skills: assessment of practical work done during practical sessions.
Quiz: assessment of theoretical knowledge underpinning lectures.
Project report and presentation: assessment of analytical and presentational skills on a chosen topic.
Final exam: assessment of the knowledge and skills that are expected to have learned throughout the semester.

Detailed information for each assessment can be found on Canvas.

Assessment criteria

The University awards common result grades, set out in the Coursework Policy 2021 (Schedule 1).

As a general guide, a high distinction indicates work of an exceptional standard, a distinction a very high standard, a credit a good standard, and a pass an acceptable standard.

Result name	Mark range	Description
High Distinction	85 - 100	Awarded when you demonstrate the learning outcomes for the unit at an exceptional standard, as defined by grade descriptors or exemplars outlined by your faculty or school.
Distinction	75 - 84	Awarded when you demonstrate the learning outcomes for the unit at a very high standard, as defined by grade descriptors or exemplars outlined by your faculty or school.
Credit	65 - 74	Awarded when you demonstrate the learning outcomes for the unit at a good standard, as defined by grade descriptors or exemplars outlined by your faculty or school.
Pass	50 - 64	Awarded when you demonstrate the learning outcomes for the unit at an acceptable standard, as defined by grade descriptors or exemplars outlined by your faculty or school.
Fail	0 - 49	When you don’t meet the learning outcomes of the unit to a satisfactory standard.

For more information see sydney.edu.au/students/guide-to-grades.

For more information see guide to grades.

Use of generative artificial intelligence (AI)

You can use generative AI tools for open assessments. Restrictions on AI use apply to secure, supervised assessments used to confirm if students have met specific learning outcomes.

Refer to the assessment table above to see if AI is allowed, for assessments in this unit and check Canvas for full instructions on assessment tasks and AI use.

If you use AI, you must always acknowledge it. Misusing AI may lead to a breach of the Academic Integrity Policy.

Visit the Current Students website for more information on AI in assessments, including details on how to acknowledge its use.

Late submission

In accordance with University policy, these penalties apply when written work is submitted after 11:59pm on the due date:

Deduction of 5% of the maximum mark for each calendar day after the due date.
After ten calendar days late, a mark of zero will be awarded.

This unit has an exception to the standard University policy or supplementary information has been provided by the unit coordinator. This information is displayed below:

According to general university policy regarding late penalties.

Academic integrity

The University expects students to act ethically and honestly and will treat all allegations of academic integrity breaches seriously.

Our website provides information on academic integrity and the resources available to all students. This includes advice on how to avoid common breaches of academic integrity. Ensure that you have completed the Academic Honesty Education Module (AHEM) which is mandatory for all commencing coursework students

Penalties for serious breaches can significantly impact your studies and your career after graduation. It is important that you speak with your unit coordinator if you need help with completing assessments.

Visit the Current Students website for more information on AI in assessments, including details on how to acknowledge its use.

Learning support

Simple extensions

If you encounter a problem submitting your work on time, you may be able to apply for an extension of five calendar days through a simple extension.  The application process will be different depending on the type of assessment and extensions cannot be granted for some assessment types like exams.

Special consideration

If exceptional circumstances mean you can’t complete an assessment, you need consideration for a longer period of time, or if you have essential commitments which impact your performance in an assessment, you may be eligible for special consideration or special arrangements.

Special consideration applications will not be affected by a simple extension application.

Using AI responsibly

Co-created with students, AI in Education includes lots of helpful examples of how students use generative AI tools to support their learning. It explains how generative AI works, the different tools available and how to use them responsibly and productively.

Support for students

The Support for Students Policy reflects the University’s commitment to supporting students in their academic journey and making the University safe for students. It is important that you read and understand this policy so that you are familiar with the range of support services available to you and understand how to engage with them.

The University uses email as its primary source of communication with students who need support under the Support for Students Policy. Make sure you check your University email regularly and respond to any communications received from the University.

Learning resources and detailed information about weekly assessment and learning activities can be accessed via Canvas. It is essential that you visit your unit of study Canvas site to ensure you are up to date with all of your tasks.

If you are having difficulties completing your studies, or are feeling unsure about your progress, we are here to help. You can access the support services offered by the University at any time:

Support and Services (including health and wellbeing services, financial support and learning support)
Course planning and administration
Meet with an Academic Adviser

Weekly schedule

WK	Topic	Learning activity
Multiple weeks	Students need to understand contents following lectures and tutorials, and work on projects.	Self-directed learning (52 hr)
Week 01	Course Overview and Cleanroom Basics	Lecture (2 hr)
Week 01	Cleanroom Tour@ Research and Prototype Foundry (RPF), Sydney Nano Hub	Practical (3 hr)
Week 02	Semiconductor Physics	Lecture (2 hr)
Week 02	Tutorial 1	Tutorial (2 hr)
Week 03	Process Overview and Wafer Manufacturing	Lecture (2 hr)
Week 03	Practical Session 1 @Research and Prototype Foundry (RPF), Sydney Nano Hub	Practical (3 hr)
Week 04	Thim Film Deposition	Lecture (2 hr)
Week 04	Tutorial 2	Tutorial (2 hr)
Week 05	Diffusion and Ion Implantation	Lecture (2 hr)
Week 05	Practical Session 2@ Research and Prototype Foundry (RPF), Sydney Nano Hub	Practical (3 hr)
Week 06	Lithography I	Lecture (2 hr)
Week 06	Tutorial 3	Tutorial (2 hr)
Week 07	Lithography II and Etching	Lecture (2 hr)
Week 07	Practical Session 3@ Research and Prototype Foundry (RPF), Sydney Nano Hub	Practical (3 hr)
Week 08	Metrology & Inspection I	Lecture (2 hr)
Week 08	Tutorial 4	Tutorial (2 hr)
Week 09	Metrology & Inspection II	Lecture (2 hr)
Week 09	Practical Session 4 @ Research and Prototype Foundry (RPF), Sydney Nano Hub	Practical (3 hr)
Week 10	Microchip Packaging	Lecture (2 hr)
Week 10	Tutorial 5	Tutorial (2 hr)
Week 11	Industry Guest Lecture	Lecture (2 hr)
Week 11	Practical Session 5@ Research and Prototype Foundry (RPF), Sydney Nano Hub	Practical (3 hr)
Week 12	Project Presentations I	Lecture (2 hr)
Week 12	Tutorial 6	Tutorial (2 hr)
Week 13	Project Presentations II	Lecture (2 hr)

Attendance and class requirements

Faculty of Engineering Resolutions: Coursework Awards, 8(1,2):

Unless otherwise stated, students are expected to attend and actively engage in all timetabled activities of a unit of study.

Study commitment

Typically, there is a minimum expectation of 1.5-2 hours of student effort per week per credit point for units of study offered over a full semester. For a 6 credit point unit, this equates to roughly 120-150 hours of student effort in total.

Learning outcomes

Learning outcomes are what students know, understand and are able to do on completion of a unit of study. They are aligned with the University's graduate qualities and are assessed as part of the curriculum.

Outcomes
Graduate qualities

At the completion of this unit, you should be able to:

LO1. Demonstrate basic knowledge and skills of working in a cleanroom environment
LO2. Demonstrate understanding of the basic principles of semiconductor physics and device fabrication
LO3. Learn about the various processing steps involved in semiconductor fabrication, including lithography, etching, deposition, doping, metrology, and packaging and testing
LO4. Gain hands-on experience with semiconductor fabrication tools and equipment through lab sessions and demonstrations
LO5. Explore the challenges and innovations in semiconductor fabrication, including the latest advancements in nanotechnology and materials science
LO6. Develop critical thinking and problem-solving skills through case studies and project work
LO7. Write technical reports to present design specific information and results concisely and accurately
LO8. Engage in team work, drawing on the knowledge, skills and creativeness of all members to deliver a solution to a particular engineering problem

Graduate qualities

The graduate qualities are the qualities and skills that all University of Sydney graduates must demonstrate on successful completion of an award course. As a future Sydney graduate, the set of qualities have been designed to equip you for the contemporary world.

GQ1	Depth of disciplinary expertise Deep disciplinary expertise is the ability to integrate and rigorously apply knowledge, understanding and skills of a recognised discipline defined by scholarly activity, as well as familiarity with evolving practice of the discipline.
GQ2	Critical thinking and problem solving Critical thinking and problem solving are the questioning of ideas, evidence and assumptions in order to propose and evaluate hypotheses or alternative arguments before formulating a conclusion or a solution to an identified problem.
GQ3	Oral and written communication Effective communication, in both oral and written form, is the clear exchange of meaning in a manner that is appropriate to audience and context.
GQ4	Information and digital literacy Information and digital literacy is the ability to locate, interpret, evaluate, manage, adapt, integrate, create and convey information using appropriate resources, tools and strategies.
GQ5	Inventiveness Generating novel ideas and solutions.
GQ6	Cultural competence Cultural Competence is the ability to actively, ethically, respectfully, and successfully engage across and between cultures. In the Australian context, this includes and celebrates Aboriginal and Torres Strait Islander cultures, knowledge systems, and a mature understanding of contemporary issues.
GQ7	Interdisciplinary effectiveness Interdisciplinary effectiveness is the integration and synthesis of multiple viewpoints and practices, working effectively across disciplinary boundaries.
GQ8	Integrated professional, ethical, and personal identity An integrated professional, ethical and personal identity is understanding the interaction between one’s personal and professional selves in an ethical context.
GQ9	Influence Engaging others in a process, idea or vision.

Outcome map

Learning outcomes	Graduate qualities
Learning outcomes

Responding to student feedback

This section outlines changes made to this unit following staff and student reviews.

This is the first time this unit has been offered.

Additional information

Work, health and safety

We are governed by the Work Health and Safety Act 2011, Work Health and Safety Regulation 2011 and Codes of Practice. Everyone has a responsibility for health and safety at work. The University’s Work Health and Safety policy explains the responsibilities and expectations of workers and others, and the procedures for managing WHS risks associated with University activities.

Disclaimer

Important: the University of Sydney regularly reviews units of study and reserves the right to change the units of study available annually. To stay up to date on available study options, including unit of study details and availability, refer to the relevant handbook.

To help you understand common terms that we use at the University, we offer an online glossary.

Current students

Overview

Overview

Unit details and rules

Teaching staff

Assessment

Assessment

Assessment summary

Assessment criteria

Use of generative artificial intelligence (AI)

Late submission

Academic integrity

Learning support

Learning support

Simple extensions

Special consideration

Using AI responsibly

Support for students

Weekly schedule

Weekly schedule

Attendance and class requirements

Study commitment

Learning outcomes

Learning outcomes

Graduate qualities

Outcome map

Responding to student feedback

Responding to student feedback

Additional information

Additional information

Work, health and safety

Disclaimer

On this page

Useful links

ELEC5405: Building Microchips: From Theory to Practice

Semester 1, 2026 [Normal day] - Camperdown/Darlington, Sydney

Overview

Overview

Unit details and rules

Teaching staff

Assessment

Assessment

Assessment summary

Assessment criteria

Use of generative artificial intelligence (AI)

Late submission

Academic integrity

Learning support

Learning support

Simple extensions

Special consideration

Using AI responsibly

Support for students

Weekly schedule

Weekly schedule

Attendance and class requirements

Study commitment

Learning outcomes

Learning outcomes

Graduate qualities

Outcome map

Responding to student feedback

Responding to student feedback

Additional information

Additional information

Work, health and safety

Disclaimer

On this page

Useful links