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Research and Prototype Foundry

Enabling excellence in fabrication and materials science

The Research and Prototype Foundry offers instruments for the fabrication of devices and structures with features on the micro and nanoscale, with specialised processes allowing users to make devices and prototype new ideas. 

The Research and Prototype Foundry, a Core Research Facility based at the Sydney Nanoscience Hub and a member of the Australian National Fabrication Facility Network, enables the development of optical chips, electronic devices and new quantum science and technology via outstanding lithography, etching, deposition and metrology capabilities.

We provide tools that allow lithographic patterning with feature sizes smaller than 10 nanometers using state-of-the-art electron beam lithography and over length scales of centimetres using the i-line stepper. Such precision is possible by housing our instruments in a purpose-built cleanroom that provides an environment with extremely precise regulation of temperature, humidity, light and air composition, vibrations, and electromagnetic interference.

Combined with our etching and deposition tools, these capabilities provide a comprehensive fabrication facility for a range of materials and structures.

Explore below our broad range of instruments. Our in-house technical staff also offer a range of value-adding services to assist users and their research projects, and we welcome enquiries from external clients requiring bespoke research and testing services.

  • ASML PAS 5500/100 i-Line stepper
  • SVG 88 track system
  • Oxford ICP reactive ion etcher
  • Atomic layer deposition
  • DWL 66+ laser mask writer
  • Elionix electron beam lithography
  • Atomic force microscopy
  • Brewer spin coater
  • Brewer developer
  • MLA 100 Maskless aligner
  • Spin dryer
  • Wet benches
  • Focused ion beam scanning electron microscopy
  • PM 5 probe station
  • Leica stereo zoom microscopy
  • Olympus stereo zoom microscopy
  • DekTak stylus profilometer
Send us your project goals and requirements, and our staff will put together a tailored registration and training program to ensure that you can make the most of our facilities.
  1. Consultation. Once we receive your project enquiry, our staff will work with you to put together a viable project design, taking into account factors such as experimental scope, instrument requirements, and budget.
  2. Activation. We will assist you in registering your project, and will guide you through any necessary formalities prior to project commencement.
  3. Induction. We will organise a bespoke instrument training program specific to your needs, giving you autonomous access to our facilities to complete your project.

Research and Prototype Foundry

  • Sydney Nanoscience Hub – Research wing (Building A31) Physics Road The University of Sydney NSW 2006