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Unit of study_

MECH5416: Design of Micro- and Nanosystems

This unit teaches the student how to recognize where and how their theoretical skills can be applied to practical situations in the field of mechanical design. As a case study, a set of widely implemented Micro-Electro-Mechanical Systems (MEMS) is introduced, including Pressure Sensors, Microphones, Accelerometers, Gyroscopes and Micromirrors. Selected mechanical designs are presented and design choices are discussed with respect to their performance. Notions specific to microfabrication and the concept of scaling laws are introduced and elucidated at commonly implemented examples. The unit includes a hands-on design and modelling part introducing modern multi-physics finite element analysis. Dedicated tutorial sessions introduce the finite element modeling of Micro-Electro-Mechanical Systems. An emphasis is laid on the capability to couple multiple physics in a single model, including deformation of solids by electrostatic, electromagnetic or electro-thermal forces. The students will learn how to conceive and engineer a MEMS design, and predict performance by multi-physics finite element analysis.

Code MECH5416
Academic unit Aerospace, Mechanical and Mechatronic
Credit points 6
(AMME2301 or AMME9301) and (AMME2500 or AMME9500) and (MECH2400 or MECH9400) or equivalent study at another institution
Assumed knowledge:
ENGG1802 or AMME1802 - Eng Mechanics; balance of forces and moments; AMME2301 - Mechanics of Solids; 2 and 3 dimensional stress and strain; AMME2500 - Engineering Dynamics - dynamic forces and moments; MECH2400 - Mechanical Design 1; approach to design problems and report writing; and preparation of engineering drawing; MECH3460 - Mechanical design 2; means of applying fatigue analysis to a wide range of machine components

At the completion of this unit, you should be able to:

  • LO1. sketch and explain the working principle of a selected MEMS design
  • LO2. draw a microfabrication process flow to manufacture a MEMS device
  • LO3. compare advantages and drawbacks of a selected MEMS design
  • LO4. interprete and evaluate the mechanical design choices of a commercially available MEMS device
  • LO5. interprete and evaluate the mechanical design choices of a commercially available MEMS device
  • LO6. perform independent research on scientific and technical literature as well as product datasheets on a selected MEMS device
  • LO7. summarize history, working principle, mechanical design, performance and applications of a selected MEMS device in a presentation
  • LO8. create a finite element model of a selected MEMS device
  • LO9. explain the main components of a multiphysics finite element analysis
  • LO10. set up, execute, solve and interprete the results of a MEMS Multiphysics finite element analysis
  • LO11. perform parameter variation of a mechanical design and discuss performance trends
  • LO12. create the mechanical design of a selected MEMS device and discuss the performance based on a finite element analysis
  • LO13. summarize the results of a MEMS design in a presentation and in a technical report